发明名称 Apparatus and method for the deflection of electromagnetic radiation, in particular of a laser beam
摘要 The deflection apparatus (1) for the deflection of electromagnetic radiation, in particular of a laser beam, includes a drive apparatus (2) and includes a beam deflection apparatus (4), in particular a mirror (4), which is arranged with the drive device (2) such that the drive apparatus (2) determines the alignment of the beam deflection apparatus (4), and includes a friction apparatus (5) which is arranged and made such that it brings about static friction or sliding friction onto the movably journaled beam deflection apparatus (4), with the drive apparatus (2) being made such that it can generate a drive force which overcomes the static friction, and includes a control apparatus (10) for the control of the drive apparatus (2). (FIG. 5)
申请公布号 US2011147606(A1) 申请公布日期 2011.06.23
申请号 US20100928385 申请日期 2010.12.10
申请人 PANTEC BIOSOLUTIONS AG 发明人 BRAGAGNA THOMAS;GROSS SIMON;GROSS ANTON;BUSSE-GRAWITZ MAX ERICK;FENGELS DIRK
分类号 H01J3/14 主分类号 H01J3/14
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