发明名称 TEMPERATURE MEASURING APPARATUS
摘要 <p>Disclosed is a temperature measuring apparatus which is provided with: a substrate (2); a temperature sensor (3) disposed on one surface of the substrate (2); and a wire (8) disposed to electrically connect together a circuit, which detects a temperature using the temperature sensor (3), and the temperature sensor (3). In said surface of the substrate (2), a recessed section (7) having a heat capacity smaller than that of the material of the substrate (2) is formed on the periphery of the temperature sensor (3). The recessed section (7) is formed at a predetermined interval from the temperature sensor (3) such that the recessed section surrounds the temperature sensor (3) and has predetermined width and depth. Preferably, the low heat capacity zone is the recessed section (7), i.e., the groove having a recessed cross-section.</p>
申请公布号 WO2011074434(A1) 申请公布日期 2011.06.23
申请号 WO2010JP71841 申请日期 2010.12.06
申请人 TOKYO ELECTRON LIMITED;ISHIDA HISAKI;HAYASHI MASATO;HIGASHI KOUDAI 发明人 ISHIDA HISAKI;HAYASHI MASATO;HIGASHI KOUDAI
分类号 G01K1/18;H01L21/66 主分类号 G01K1/18
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