| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface-treated aluminum material for vacuum equipment, which has few film defects and is superior in vacuum properties and corrosion resistance. SOLUTION: The manufacturing method includes setting an aluminum material as an anode and passing a direct current to electrolyze the aluminum material in an acidic electrolytic solution which has a pH of 3 or less and a solution temperature of 50°C or higher, as a pretreatment of a step for forming a non-porous anodic oxide film. The electrolytic condition preferably includes the current density of 2-100 A/dm<SP>2</SP>and a treatment time of 5-100 seconds, and the electrolytic solution to be used preferably contains at least one acid selected from sulfuric acid, nitric acid and phosphoric acid. An intermetallic compound in the surface of the aluminum material is removed by the pretreatment, the non-porous anodic oxide film having few film defects is obtained in the subsequent step of forming the non-porous anodic oxide film, and the corrosion resistance of the aluminum material is enhanced. COPYRIGHT: (C)2011,JPO&INPIT |
