| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for monitoring the movement of at least one moving mirror in a MEMS device, based on the variation of the capacity of the MEMS device over time. <P>SOLUTION: The method for monitoring movement of at least one moving mirror in a MEMS device based upon capacitance changes over time in the MEMS device includes, when at least one moving mirror is an in-plain mirror steps of: providing DC voltage to the MEMS device in addition to a driving voltage required for the movement of the at least one moving mirror; measuring current proportional to capacitance changes associated with the movement of the at least one moving mirror; and monitoring the movement of the at least one moving mirror based on the measured current. When the one moving mirror is a staggered mirror, the method includes the steps of: measuring a current associated with the movement of the at least one moving mirror; identifying a plurality of ripples associated with capacitance changes in the MEMS device over time, in the measured current; and monitoring the movement of the at least one moving mirror based on the identified plurality of ripples. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
