| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for easily obtaining a pellicle for sensitivity verification which is attached with a desired number of standard particles. <P>SOLUTION: This is a method for preparing a pellicle for sensitivity verification which is attached with standard particles, the pellicle being used in a device which detects foreign substances on the surface of a pellicle film. The method includes: (1) a process in which the standard particles are preliminarily sprayed on the surface of a pellicle film to prepare the pellicle attached with the standard particles; (2) a process in which a surface attached with the particles of the obtained pellicle attached with the standard particles, is brought into intimate contact with a clean pellicle film to which particles are not substantially attached; and (3) a process in which the pellicle films which are brought into mutual intimate contact are pulled off to transfer the standard particles to the surface side of the clean pellicle film. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
