发明名称 Apparatus and method for transformation of substrate
摘要 A method is disclosed for forming a layer of a wide bandgap material in a non-wide bandgap material. The method comprises providing a substrate of a non-wide bandgap material and converting a layer of the non-wide bandgap material into a layer of a wide bandgap material. An improved component such as wide bandgap semiconductor device may be formed within the wide bandgap material through a further conversion process.
申请公布号 US2011151648(A1) 申请公布日期 2011.06.23
申请号 US20110932249 申请日期 2011.02.22
申请人 QUICK NATHANIEL R 发明人 QUICK NATHANIEL R.
分类号 H01L21/20 主分类号 H01L21/20
代理机构 代理人
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