发明名称 TEMPERATURE CONTROL APPARATUS FOR CONTROLLING LOAD HEATING HAVING TWO WAY VALVE
摘要 PURPOSE: A temperature control device with two way valve for controlling lead heat is provided to reduce installation and maintenance costs by supplying cooled fluid to a processing device at a constant temperature without an additional heater. CONSTITUTION: A water tank(2) is divided into a cold water filler(21) and a warm water filter(22). A partition wall(23) is formed in the center of the water tank. A cooling device(3) cools fluid filled in the cold water filler to a preset temperature. The cooling device is comprised of an evaporator(31) and a refrigerator(32). A temperature control unit(4) controls the load heat of the processing device by receiving fluid from a cold water outlet(41) and a warm water outlet(42).
申请公布号 KR20110069394(A) 申请公布日期 2011.06.23
申请号 KR20090126109 申请日期 2009.12.17
申请人 DONGKWANG SD, INC. 发明人 YOON, BAI WON;CHO, JAE GOO
分类号 H01L21/02;H01L21/66 主分类号 H01L21/02
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