发明名称 |
TEMPERATURE CONTROL APPARATUS FOR CONTROLLING LOAD HEATING HAVING TWO WAY VALVE |
摘要 |
PURPOSE: A temperature control device with two way valve for controlling lead heat is provided to reduce installation and maintenance costs by supplying cooled fluid to a processing device at a constant temperature without an additional heater. CONSTITUTION: A water tank(2) is divided into a cold water filler(21) and a warm water filter(22). A partition wall(23) is formed in the center of the water tank. A cooling device(3) cools fluid filled in the cold water filler to a preset temperature. The cooling device is comprised of an evaporator(31) and a refrigerator(32). A temperature control unit(4) controls the load heat of the processing device by receiving fluid from a cold water outlet(41) and a warm water outlet(42).
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申请公布号 |
KR20110069394(A) |
申请公布日期 |
2011.06.23 |
申请号 |
KR20090126109 |
申请日期 |
2009.12.17 |
申请人 |
DONGKWANG SD, INC. |
发明人 |
YOON, BAI WON;CHO, JAE GOO |
分类号 |
H01L21/02;H01L21/66 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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