| 摘要 |
<p>PURPOSE: An imprint apparatus and pattern transfer method are provided to harden a resin when the resin contacts the pattern of a mold, thereby successively transferring a pattern on a plurality of shots. CONSTITUTION: A support member(3) supports a mold(2) with a pattern. A mark(4) and a scope are formed on the mold. The mark is coupled with the scope in the support member. The scope optically monitors marks(13) formed on each shot. A stage reference member(8) is loaded on a substrate stage(7). A controller(C) detects the positional deviation of the shot about the mold.</p> |
