SEMICONDUCTOR DEVICE, MEASUREMENT APPARATUS, AND MEASUREMENT METHOD OF RELATIVE PERMITTIVITY,申请号US20100966186-传众专利搜索

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发明名称	SEMICONDUCTOR DEVICE, MEASUREMENT APPARATUS, AND MEASUREMENT METHOD OF RELATIVE PERMITTIVITY
摘要
申请公布号	US2011147736(A1)	申请公布日期	2011.06.23
申请号	US20100966186	申请日期	2010.12.13
申请人	SEMICONDUCTOR ENERGY LABORATORY CO., LTD.	发明人	MIYANAGA AKIHARU;HONDA TATSUYA
分类号	H01L29/12;H01L21/336	主分类号	H01L29/12
代理机构		代理人
主权项
地址

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