METHOD FOR FORMING PIEZLELETRIC THICK LAYER

摘要

PURPOSE: A method for forming a piezoelectric thick layer is provided to easily the thickness and size of a piezoelectric thick film by coating a solvent including at least one organic compound with a solution with dissolved P(VDF-TrFE) powder through a tap casting. CONSTITUTION: In a method for forming a piezoelectric thick layer, piezoelectric powder is dissolved by a solvent including at least one organic compound(S110). A first electrode is formed on the too side of a substrate. A solution is coated on the top side of the substrate through a tape-casting(S130). A piezoelectric thick film is formed by performing a thermal process of the substrate on which the solution is coated(S150). A second electrode is formed on the top of the solution passing the thermal process. A substrate is removed from the piezoelectric thick film(S170).