| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve Q value of vibration and to reduce variation in Q value in a material detection element of the type of joining a vibrator to a support substrate. <P>SOLUTION: The material detection element 1A comprises the vibrator 3A, a detection film 4A that is disposed in the vibrator and is made to interact with a target material, and the support substrate 2 that is joined to the vibrator and supports the vibrator. The vibrator comprises a base section 3a joined to the support substrate 2, a vibration section 3c that has the detection film and is thinner than the base section, and an intermediate section 3b that is disposed between the base section and the vibration section and is thinner than the base section. The thickness of the vibration section differs from that of the intermediate section. The target material is detected based on the variation of vibration state of the vibrator based on the interaction between the target material and the detection film. <P>COPYRIGHT: (C)2007,JPO&INPIT |
