发明名称 |
FILM-FORMING METHOD |
摘要 |
The method for depositing a film of the present invention comprises the first irradiation step of irradiating particles having energy on a surface of a substrate 101, the first film deposition step of depositing a first film 103 on the surface of the substrate 101 subjected to the first irradiation step by using a dry process, and the second film deposition step of depositing a second film 105 having oil repellency on a surface of the first film 103. According to the present invention, a method for depositing a film enabling production of an oil-repellent substrate comprising an oil-repellent film having abrasion resistance of a practically sufficient level can be provided. |
申请公布号 |
EP2336384(A1) |
申请公布日期 |
2011.06.22 |
申请号 |
EP20090819060 |
申请日期 |
2009.08.24 |
申请人 |
SHINCRON CO., LTD. |
发明人 |
SHIONO, ICHIRO;NAGAE, EKISHU;JIANG, YOUSONG;SUGAWARA, TAKUYA |
分类号 |
C23C14/02;C03C17/42;C23C14/00;C23C14/34;C23C14/50;C23C14/56;H01J37/34 |
主分类号 |
C23C14/02 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|