SEMICONDUCTOR PROCESSING SYSTEM AND RECORDING MEDIUM

摘要

PURPOSE: A semiconductor processing system and recording medium are provided to select a carrying route with the largest throughput about an object to be handled, thereby increasing the throughput of the processing system. CONSTITUTION: A plurality of processing modules(107~110) processes an object to be handled. A plurality of carrying robots(105,106) provides and receives the object to be handled to and from a processing module. A carrying machine connects the carrying robots to carry the object to be handled. A carrying route determining unit selects a carrying route with the highest throughput. A throughput calculating unit calculates the throughput of the carrying route.