发明名称 A SEMICONDUCTOR DEVICE
摘要 <p>PURPOSE: A semiconductor device is provided to improve productivity by comprising various kinds of thin film transistor structures on the same substrate to reduce the number of processes. CONSTITUTION: A first gate electrode(401) and a second gate electrode(101) are formed on a substrate(400) with an insulation surface. A gate insulation layer(403) covers a first gate electrode and a second gate electrode. A metal thin film(470) is formed on the gate insulation layer. A metal thin film is selectively removed by photolithography technology. An oxide semiconductor layer(471) is formed on the metal thin film and the gate insulation layer.</p>
申请公布号 KR20110068964(A) 申请公布日期 2011.06.22
申请号 KR20110055788 申请日期 2011.06.09
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 YAMAZAKI SHUNPEI;SAKATA JUNICHIRO;KOYAMA JUN
分类号 H01L29/786;G02F1/136 主分类号 H01L29/786
代理机构 代理人
主权项
地址