THE ACTIVE PIEZOELECTRIC ENERGY HARVESTER HAVING EMBEDDED VARIABLE CAPACITANCE LAYER AND MANUFACTURING METHOD THEREOF

摘要

PURPOSE: An active piezoelectric energy harvester having an embedded variable capacitance layer and a manufacturing method thereof are provided to adjust resonant frequency in real time by controlling a DC voltage applied to a built-in variable charge layer. CONSTITUTION: In an active piezoelectric energy harvester having an embedded variable capacitance layer and a manufacturing method thereof, a piezoelectric layer(210) generates voltage through vibration or pressure. A pinned layer(230) fixes the piezoelectric layer. A variable charge layer(250) is fixed to the one side of the pinned layer. Variable charge layer electrodes(260a,260b) a weight(270) are formed on the top and bottom of the variable charge layer. Adhesive layers(L1,L2,L3) are formed between the weight layer and the pinned layer.