RF component comprising a switch based on carbon nanotubes

摘要

The radiofrequency component comprises a radiofrequency (RF) line coplanar with a metal surface at a surface of a substrate covering partially a dielectric layer, a commutator structure located between the coplanar line and the metal surface, a first series of nanotubes or nanofibers vertically located at the RF line, a second series of nanotubes or nanofibers vertically located to the metal surface and a third series of nanotubes or nanofibers vertically located at a parallelopiped cavity produced in the dielectric layer and in contact with the surface of the substrate. The radiofrequency component comprises a radiofrequency (RF) line coplanar with a metal surface at a surface of a substrate covering partially a dielectric layer, a commutator structure located between the coplanar line and the metal surface, a first series of nanotubes or nanofibers vertically located at the RF line, a second series of nanotubes or nanofibers vertically located to the metal surface and a third series of nanotubes or nanofibers vertically located at a parallelopiped cavity produced in the dielectric layer and in contact with the surface of the substrate. The cavity is located between the RF line and the metal surface for activating the nano-commutator structure by applying a weak difference of the potential between the RF line and the metal surface with a polarization of the substrate. The potential difference is lower than 1 V, and the polarization voltage of the substrate is greater than 10 V. The RF line is located between two metal surfaces comprising plane mass (M 1, M 2). The RF line and the metal surface are parallel between them according to a first direction, and comprise two side elements perpendicular to the first direction and cooperating between them via communication at the intermediate of series of nanotubes or nanofibers. The side elements have an opening positioned with respect to the cavity in which a third series of nanotubes or nanofibers are produced. The first and second series of nanotubes or nanofibers comprise nanotubes coated with a dielectric material or a metal layer. The cavities have dimensions of few micrometers. The distance between the signal line and the plane mass is 10-100 microns.