| 摘要 |
PURPOSE: An acoustic sensor and manufacturing method thereof are provided to remove a process of processing the rear surface of a substrate, thereby simplifying manufacturing processes. CONSTITUTION: An acoustic sensor comprises a substrate(200), an acoustic chamber(202), an insulation film(210), an acoustic chamber open pattern(212), a vibration plate(220), a self maintaining support stand(225), a fixing electrode(230), an etching window(234), and an etching hole(235). The insulation film is formed on the substrate. The vibration plate supported by the self maintaining support stand is formed on the insulation film. The self maintaining support stand suppresses the horizontal movement of the vibration plate and the self maintaining support stand. The vibration plate is integrated with the self maintaining support stand. A conductive layer included in the vibration plate forms a pair of upper/lower electrodes with the fixing electrode. The fixing electrode has a shape which surrounds the vibration plate.
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