发明名称 ELECTROMAGNETIC RADIATION DETECTOR WITH MICRO-ENCAPSULATION, AND DEVICE FOR DETECTING ELECTROMAGNETIC RADIATION USING SUCH DETECTORS
摘要 This electromagnetic radiation detector consists of a plurality of elementary detection micro-sites, each including a micro-detector provided with a membrane (2) that is sensitive to the radiation in question and each being provided in a micro-cavity or micro-capsule defined by a substrate (1), by an upper wall (5) used as a window that is transparent to said radiation and by side walls (4), said membrane (2) being suspended above substrate (1) by means of at least two support arms (6) that include an electrically conducting layer (17), with the ends of said arms (6) being anchored in side walls (4).
申请公布号 EP2335037(A1) 申请公布日期 2011.06.22
申请号 EP20090755972 申请日期 2009.10.06
申请人 ULIS 发明人 VILAIN, MICHEL
分类号 G01J5/20;H01L31/0203 主分类号 G01J5/20
代理机构 代理人
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