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经营范围
发明名称
Fast atom bombardment source, fast atom beam emission method, and surface modification apparatus
摘要
申请公布号
GB2437820(B)
申请公布日期
2011.06.22
申请号
GB20070007929
申请日期
2007.04.24
申请人
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.;PANASONIC CORPORATION
发明人
TAKASHI OMURA;SHINJI ISHITANI;NAOKI SUZUKI
分类号
H05H3/02;G21K5/04
主分类号
H05H3/02
代理机构
代理人
主权项
地址
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