| 摘要 |
<p>The present invention comprises: a flow sensor 12 which is formed of a sensor chip 22 in which a flow rate detecting section 27 is formed on an electric insulating film applied to cover at least a part of a concave portion formed on an upper surface of a substrate and a flow path forming member 23 which is provided on the sensor chip and has a flow path 24 of a fluid flowing through the flow rate detecting section formed therein; a metal flow path body 14 which accommodates the flow sensor and has an accommodating portion 14c accommodating the flow sensor in a state where an inner peripheral surface of the flow path body is separated from an outer peripheral portion of the flow sensor formed therein; a metal attachment plate 13 which is fixed to the flow path body so as to accommodate the flow sensor in the accommodating portion of the flow path body in a state where the flow sensor is fixed and held; and an insulating member 29 which is interposed between the sensor chip of the flow sensor and the attachment plate, bonded to the sensor chip, and also bonded to the attachment plate.
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