发明名称 |
Improved method of texturing semiconductor substrates |
摘要 |
<p>Semiconductor substrates are cleaned and subsequently oxidized. After the semiconductor is oxidized it is textured to reduce incident light reflectance. The textured semiconductors can be used in the manufacture of photovoltaic devices.</p> |
申请公布号 |
EP2337089(A2) |
申请公布日期 |
2011.06.22 |
申请号 |
EP20100195561 |
申请日期 |
2010.12.17 |
申请人 |
ROHM AND HAAS ELECTRONIC MATERIALS LLC |
发明人 |
BARR, ROBERT K;O'CONNOR, COREY |
分类号 |
H01L31/18 |
主分类号 |
H01L31/18 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|