发明名称 Improved method of texturing semiconductor substrates
摘要 <p>Semiconductor substrates are cleaned and subsequently oxidized. After the semiconductor is oxidized it is textured to reduce incident light reflectance. The textured semiconductors can be used in the manufacture of photovoltaic devices.</p>
申请公布号 EP2337089(A2) 申请公布日期 2011.06.22
申请号 EP20100195561 申请日期 2010.12.17
申请人 ROHM AND HAAS ELECTRONIC MATERIALS LLC 发明人 BARR, ROBERT K;O'CONNOR, COREY
分类号 H01L31/18 主分类号 H01L31/18
代理机构 代理人
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