| 摘要 |
PURPOSE: A substrate coater is provided to minimize the damage on a slit nozzle by the malfunction, by preventing the power overload on the slit nozzle when the slit nozzle collides with a stage or a substrate. CONSTITUTION: A substrate coater comprises the following: a nozzle unit(120) spraying a drug solution on a substrate; a horizontal driving unit(123) connected to the nozzle unit for horizontally transporting the nozzle unit; a lift driving unit(125) connected to the nozzle unit for lifting the nozzle unit; and a dropping prevention unit installed on the lift driving unit for limiting the downward movement of the nozzle unit. |
