发明名称 NON-POLAR (AL,B,IN,GA)N QUANTUM WELL AND HETEROSTRUCTURE MATERIALS AND DEVICES
摘要 Non-polar (1120) a-plane gallium nitride (GaN) films with planar surfaces are grown on (1102) r-plane sapphire substrates by employing a low temperature nucleation layer as a buffer layer prior to a high temperature growth of the non-polar (1120) a-plane GaN thin films
申请公布号 KR20110069133(A) 申请公布日期 2011.06.22
申请号 KR20117010086 申请日期 2003.04.15
申请人 THE REGENTS OF THE UNIVERSITY OF CALIFORNIA 发明人 CRAVEN MICHAEL D.;KELLER STACIA;DENBAARS STEVEN P.;MARGALITH TAL;SPECK JAMES S.;NAKAMURA SHUJI;MISHRA UMESH K.
分类号 C30B25/02;C23C16/04;C30B25/04;C30B25/10;C30B25/18;C30B29/38;C30B29/40;C30B29/60;H01L21/205;H01L33/00;H01S5/343 主分类号 C30B25/02
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