| 摘要 |
<p>PURPOSE: A substrate processing device, substrate processing method, and recording medium storing a program for executing the substrate processing method are provided to uniformly support the entire substrate. CONSTITUTION: A loading stage(150) includes a stage surface installed in a carrying path(34). The loading stage loads a processed substrate on the stage surface. A first rotator can rotate along with an axis expanded from the lower part of the stage surface to the carrying path. A second rotator(170) can rotate along with an axis independently from the first rotator.</p> |
