发明名称 OPTICAL ELEMENT AND METHOD OF PRODUCING SAME
摘要 Provided is a method of producing an optical element, including: forming a frame portion on a substrate and forming a structural body in a space portion surrounded by the frame portion to thereby form a first optical member; disposing a second optical member on the first optical member in a reduced pressure environment to form an optical element in which the space portion is sealed in a pressure-reduced state; and exposing the optical element to the atmosphere to thereby bring the structural body and the second optical member into close contact with each other by a differential pressure between the atmosphere and the space portion sealed in the pressure-reduced state. Accordingly, it is possible to, when the optical element is bonded, suppress damage to the optical element during the bonding and further improve the function and strength of the optical element without use of an adhesive.
申请公布号 EP2283389(A4) 申请公布日期 2011.06.22
申请号 EP20090754842 申请日期 2009.05.26
申请人 CANON KABUSHIKI KAISHA 发明人 IWAKATA, MASAHIDE;ARAI, KAZUHIRO;TERADA, JUNJI
分类号 G02B5/30;G02B5/18 主分类号 G02B5/30
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