发明名称 Anti-reflective device having an anti-reflective surface formed of silicon spikes with nano-tips
摘要 Described is a device having an anti-reflection surface. The device comprises a silicon substrate with a plurality of silicon spikes formed on the substrate. A first metallic layer is formed on the silicon spikes to form the anti-reflection surface. The device further includes an aperture that extends through the substrate. A second metallic layer is formed on the substrate. The second metallic layer includes a hole that is aligned with the aperture. A spacer is attached with the silicon substrate to provide a gap between an attached sensor apparatus. Therefore, operating as a Micro-sun sensor, light entering the hole passes through the aperture to be sensed by the sensor apparatus. Additionally, light reflected by the sensor apparatus toward the first side of the silicon substrate is absorbed by the first metallic layer and silicon spikes and is thereby prevented from being reflected back toward the sensor apparatus.
申请公布号 US7964433(B2) 申请公布日期 2011.06.21
申请号 US20090462960 申请日期 2009.08.12
申请人 CALIFORNIA INSTITUTE OF TECHNOLOGY 发明人 BAE YOUNGSAM;MANOHARA HARISH;MOBASSER SOHRAB;LEE CHOONSUP
分类号 H01L21/00 主分类号 H01L21/00
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