发明名称 Acoustic sensor with piezo-arrangement film
摘要 Provided is an acoustic sensor for measuring a sound wave propagating through a gas such as air or a fluid such as water and an elastic wave propagating through a solid medium, and more particularly, an acoustic sensor with a piezo-arrangement film capable of detecting frequencies in a broad band or amplifying a signal at a specific frequency by comparting a waveguide into an upper waveguide and a lower waveguide by means of a compartment diaphragm and arranging piezoelectric sensors on the compartment diaphragm in several forms. The acoustic sensor can be utilized as a resonant acoustic sensor in which the piezoelectric sensors are arranged on the compartment diaphragm in the same form so that a signal at a specific frequency overlaps for high sensibility or a broadband acoustic sensor in which the piezoelectric sensors are arranged in a different form to detect frequencies in a broad band. The sensor for measuring an acoustic wave includes a waveguide including a vibrating membrane for receiving the acoustic wave, an emitting membrane for emitting the acoustic wave, and a propagation medium filled therein for propagating the acoustic wave received by the vibrating membrane; a compartment diaphragm for computing the waveguide into an upper waveguide and a lower waveguide; an omni-directional endpoint processing unit formed at an end of the waveguide for absorbing the acoustic wave received by the vibrating membrane; and a plurality of piezoelectric sensors formed on the compartment diaphragm for detecting the acoustic wave.
申请公布号 US7965018(B2) 申请公布日期 2011.06.21
申请号 US20070515485 申请日期 2007.07.27
申请人 KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE 发明人 YOON DONG JIN;LEE YOUNG SUP;KWON JAE HWA
分类号 H01L41/08;G01H11/08;G01N29/00;H01P1/20 主分类号 H01L41/08
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