发明名称 |
Acoustic sensor with piezo-arrangement film |
摘要 |
Provided is an acoustic sensor for measuring a sound wave propagating through a gas such as air or a fluid such as water and an elastic wave propagating through a solid medium, and more particularly, an acoustic sensor with a piezo-arrangement film capable of detecting frequencies in a broad band or amplifying a signal at a specific frequency by comparting a waveguide into an upper waveguide and a lower waveguide by means of a compartment diaphragm and arranging piezoelectric sensors on the compartment diaphragm in several forms. The acoustic sensor can be utilized as a resonant acoustic sensor in which the piezoelectric sensors are arranged on the compartment diaphragm in the same form so that a signal at a specific frequency overlaps for high sensibility or a broadband acoustic sensor in which the piezoelectric sensors are arranged in a different form to detect frequencies in a broad band. The sensor for measuring an acoustic wave includes a waveguide including a vibrating membrane for receiving the acoustic wave, an emitting membrane for emitting the acoustic wave, and a propagation medium filled therein for propagating the acoustic wave received by the vibrating membrane; a compartment diaphragm for computing the waveguide into an upper waveguide and a lower waveguide; an omni-directional endpoint processing unit formed at an end of the waveguide for absorbing the acoustic wave received by the vibrating membrane; and a plurality of piezoelectric sensors formed on the compartment diaphragm for detecting the acoustic wave.
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申请公布号 |
US7965018(B2) |
申请公布日期 |
2011.06.21 |
申请号 |
US20070515485 |
申请日期 |
2007.07.27 |
申请人 |
KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE |
发明人 |
YOON DONG JIN;LEE YOUNG SUP;KWON JAE HWA |
分类号 |
H01L41/08;G01H11/08;G01N29/00;H01P1/20 |
主分类号 |
H01L41/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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