发明名称 |
Multi-variable regression for metrology |
摘要 |
A method for assessing metrology tool accuracy is described. Multi-variable regression is used to define the accuracy of a metrology tool such that the interaction between different measurement parameters is taken into account. A metrology tool under test (MTUT) and a reference metrology tool (RMT) are used to measure a set of test profiles. The MTUT measures the test profiles to generate a MTUT data set for a first measurement parameter. The RMT measures the test profiles to generate RMT data sets for the first measurement parameter, and at least a second measurement parameter. Multi-variable regression is then performed to generate a best-fit plane for the data sets. The coefficient of determination (R2 value) represents the accuracy index of the MTUT.
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申请公布号 |
US7966142(B2) |
申请公布日期 |
2011.06.21 |
申请号 |
US20080103690 |
申请日期 |
2008.04.15 |
申请人 |
GLOBALFOUNDRIES SINGAPORE PTE. LTD. |
发明人 |
ZHOU WEN ZHAN;ZOU ZHENG;GOH JASPER;ZHOU MEI SHENG |
分类号 |
G01D21/00;G06F19/00 |
主分类号 |
G01D21/00 |
代理机构 |
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