| 摘要 |
A probe storage device includes a base plate having a main body provided with a substantially planar surface, and a scanner chip body. The scanner chip body extends across the base plate. The scanner chip body includes first and second substantially parallel planar surfaces that collectively define an outer peripheral edge portion. The scanner chip body further includes at least a mechanical ground portion fixedly mounted to the base plate, a suspension portion, and a scan table base portion. The scan table base portion is selectively movable relative to the mechanical ground portion. The probe storage device further includes a scan table platform. The scan table platform includes first and second parallel substantially planar surfaces. The scan table platform extends across, is offset relative to, and mechanically linked with the scan table base portion so as to form a composite multi-layered support table for the media.
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