| 摘要 |
<p>Provided is a power feeding structure of an electrostatic chuck including a lower insulation layer, an electrode layer and a surface insulation dielectric layer formed on an upper surface side of a metal substrate in order from the metal substrate, in which the lower insulation layer, the electrode layer and the surface insulation dielectric layer are not cracked easily. The power feeding structure of an electrostatic chuck includes: a through hole formed through an upper surface and a lower surface of the metal substrate; a power feeding terminal disposed in the through hole for supplying a voltage supplied from a lower surface side of the metal substrate to the electrode layer formed on the upper surface side of the metal substrate; and an insulation holding member formed of an electric insulating material for insulating an inner wall of the through hole from the power feeding terminal and for holding the power feeding terminal, and the power feeding terminal includes a power feeding end portion that protrudes to the upper surface side of the metal substrate, and a tip of the power feeding end portion is positioned at the electrode layer side with respect to an interface between the electrode layer and the lower insulation layer, and on and under an interface between the electrode layer and the surface insulation dielectric layer.</p> |
