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发明名称
METHODS FOR SILICON THIN FILM DEPOSITION WITH ENERGETIC BEAM IRRADIATION
摘要
申请公布号
KR101042636(B1)
申请公布日期
2011.06.20
申请号
KR20080110565
申请日期
2008.11.07
申请人
发明人
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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