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发明名称
Thermal cathode electron emitting vacuum channel transistor, diode and method of fabricating the same transistor
摘要
申请公布号
KR101042962(B1)
申请公布日期
2011.06.20
申请号
KR20080106581
申请日期
2008.10.29
申请人
发明人
分类号
H01L29/861
主分类号
H01L29/861
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代理人
主权项
地址
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