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发明名称
PLASMA FILM DEPOSITION SYSTEM AND METHOD FOR PRODUCING FILM
摘要
申请公布号
KR101043166(B1)
申请公布日期
2011.06.20
申请号
KR20097002473
申请日期
2007.07.04
申请人
发明人
分类号
C23C14/32;C23C14/08;G02F1/1343;H01J17/49
主分类号
C23C14/32
代理机构
代理人
主权项
地址
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