NOZZLE PLATE AND METHOD OF MANUFACTURING THE SAME

摘要

PURPOSE: A nozzle plate and a manufacturing method thereof are provided to discharge liquid drops having precise volume by forming a permittivity reduction zone on the upper part of a substrate around a nozzle. CONSTITUTION: A nozzle plate includes: a substrate(110) having a nozzle; a permittivity reduction zone formed on the upper part of the substrate around a nozzle and provided with many pores and many partition walls formed between the pores; and a protective film(130) formed on the substrate to cover the pores and the partition walls.