VARIABLE CAPACITOR AND INDUCTOR

摘要

PURPOSE: A variable capacitor and variable inductor are provided to efficiently couple a variable element of a continuously variable range with a variable element of a discontinuously variable range, thereby expanding a continuously variable range. CONSTITUTION: A variable capacitor consecutively varies capacitance using a MEMS(Micro Electro Mechanical System) electrostatic driving method. A unit capacitor is made of an MIM(Metal-Insulator-Metal) capacitor. The MIM capacitor comprises a first metal layer formed on an insulating substrate, an insulating layer formed on the first metal layer, and a second metal layer formed on the insulating layer.