LITHOGRAPH APPARATUS FOR USING A BALLISTIC-ELECTRON EMISSION DEVICE,申请号KR20090047424-传众专利搜索

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发明名称	LITHOGRAPH APPARATUS FOR USING A BALLISTIC-ELECTRON EMISSION DEVICE
摘要
申请公布号	KR101042250(B1)	申请公布日期	2011.06.17
申请号	KR20090047424	申请日期	2009.05.29
申请人		发明人
分类号	H01L21/027;H01J1/304	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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