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发明名称
Defect-inspecting apparatus and contol method therof
摘要
申请公布号
KR101041840(B1)
申请公布日期
2011.06.17
申请号
KR20080045086
申请日期
2008.05.15
申请人
发明人
分类号
G01N23/04;G01N23/00;G01N23/18
主分类号
G01N23/04
代理机构
代理人
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地址
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