MATHOD FOR FORMING MOLD FOR IMPRINTING AND METHOD FOR FORMING PATTERN USING MOLD FOR IMPRINTING

摘要

PURPOSE: A method for forming a mold for imprinting and a method for forming a pattern using the mold are provided to prevent the increase of a process step and manufacturing costs by forming the multilayer fine pattern of a liquid crystal display through one mold for imprint. CONSTITUTION: In a method for forming a mold for imprinting and a method for forming a pattern using the mold, a metal layer is formed on a substrate(100). A first photo resist pattern is formed on the metal layer. A substrate is etched by using a first photo resist pattern as an etch mask to form a first pattern. The first photo resist pattern is etched to form a second photoresist pattern. A substrate is etched by using a second photo resist pattern as an etch mask to form a second pattern.