| 摘要 |
PURPOSE: A laser processing apparatus is provided to prevent dust inhaled to a dust collection chamber from being attached on a condensing lens by effectively guiding the dust to an outlet port. CONSTITUTION: A laser processing apparatus comprises a chuck table(36) and a laser beam irradiation unit. An object is placed on the chuck table. The laser beam irradiation unit irradiates a laser beam to the object on the chuck table. The laser beam irradiation unit comprises a laser beam oscillator, a light collector(53), and a dust discharge unit(7). The laser beam oscillator oscillates the laser beam. The light collector comprises a condensing lens(533) for collecting the oscillated laser beam. The dust discharge unit is installed in the end of the light collector. |
