MIKROELEKTROMECHANISCHER RESONATOR MIT ABSTIMMBAREM LUFTSPALT UND VERFAHREN ZU DESSEN ABSTIMMUNG,申请号DE20026039951-传众专利搜索

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发明名称	MIKROELEKTROMECHANISCHER RESONATOR MIT ABSTIMMBAREM LUFTSPALT UND VERFAHREN ZU DESSEN ABSTIMMUNG
摘要
申请公布号	DE60239951(D1)	申请公布日期	2011.06.16
申请号	DE20026039951	申请日期	2002.11.14
申请人	CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS)	发明人	KAISER, ANDREAS;GALAYKO, DIMITRI YURIEVITCH;COLLARD, DOMINIQUE JULES
分类号	B81B3/00;H03H9/02;B81C99/00;H03H3/007;H03H9/24	主分类号	B81B3/00
代理机构		代理人
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