| 摘要 |
PURPOSE: A film forming apparatus is provided to prevent the degradation of a deposition rate by reducing the dilution of a first gas and a second gas. CONSTITUTION: A spinning table(2) having rotation center is arranged at the center of a vacuum container(1). The vacuum container separates a top plate from a container. The top plate is attached to the container. A rotary shaft(22) and a driving part(23) are accepted within a cylindrical case(20). A first reaction gas providing unit supplies a first reaction gas to a first side. A second reaction gas providing unit supplies a second reaction gas to a first side of the spinning table.
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