| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide: an interferometer system capable of reducing an error of a detection result; a stage device; and an exposure device. <P>SOLUTION: The interferometer system detects position information on a moving body. The interferometer system includes: a light source which emits light; a spectral device which spectrally diffuses and emits the light; a moving mirror which is provided on the moving body and reflects the spectrally diffused light; a light-receiving device which receives light passed through the moving mirror; a first optical system which forms a predetermined optical path where the light is emitted from the spectral device, and made incident on and reflected by the moving mirror to travel toward the spectral device; a second optical system which guides light such that the light traveling through the optical path travels through the optical path in the opposite direction from the traveling direction of the optical path without entering the spectral device; and a second spectral device which spectrally diffuses the light such that a predetermined component of the light traveling through the second optical system enters the light-receiving device and components other than the predetermined component do not enter the optical path. <P>COPYRIGHT: (C)2011,JPO&INPIT |
