| 摘要 |
<P>PROBLEM TO BE SOLVED: To miniaturize a θZ drive device positioning a substrate used in a semiconductor manufacturing device or the like. <P>SOLUTION: The θZ drive device includes a cylindrical frame 17 erected on a base 6, a θZ actuator 15 which is arranged on an inner face of the frame 17 and drives a table 1 in a Z direction and a θ direction, a rise and fall supporting part 7 supporting the table 1 so that it can rise and fall in the Z direction, a rotation supporting part 4 supporting the table 1 so that it can rotate in the θ direction, and a position detection unit 31 for acquiring rise/fall positions and a rotation position of the table 1. All of the rise/fall supporting part 7, the rotation supporting part 4 and the position detection unit 31 are arranged on an inner side of the θZ actuator 15 and are arranged so as to be settled in a height of the Z direction of the θZ actuator 15. <P>COPYRIGHT: (C)2011,JPO&INPIT |
