| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical member deformation apparatus wherein the optical characteristics of an optical member can be adjusted accurately, and to provide an optical system, an aligner, and a method of manufacturing a device. <P>SOLUTION: A mirror deformation apparatus 53 which deforms the shape of a concave mirror 41 includes a second permanent magnet 72 which is fixed to the concave mirror 41, a first permanent magnet 71 which is arranged to face the second permanent magnet 72, and a displacement mechanism 80 which displaces the first permanent magnet 71 so that the relative distance to the second permanent magnet 72 changes based on the driving force transmitted from an actuator 61. <P>COPYRIGHT: (C)2011,JPO&INPIT |
