| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that accurate measurement cannot be made in the shape measurement of a measurement object placed on a moving table, such as a substrate of an MOCVD (metal organic chemical vapor deposition) device, due to the following reasons: the measurement accuracy is lowered by the influence of offset values varying according to the use situation of a speed measuring device; the measurement accuracy is lowered in a device having a turntable on which a plurality of measurement objects are placed; and the measurement accuracy is lowered by vibration of the turntable, inclination of a rotary shaft, etc. SOLUTION: In the device, a plurality of measurement objects are arranged on the circumference around the rotary shaft as the center on the turntable with gaps between them. An arithmetic processing means of the device includes: a measurement object speed extraction means for extracting the speed of the measurement object in the vertical direction with respect to the laser irradiation face from a speed signal output from a speed measurement means, based on the speed signal output from the speed measurement means and a signal showing that the measurement object is at a laser irradiation position output from a measurement object detection means; a speed averaging means for calculating a speed average value of the measurement object using at least a part of the signals output from the measurement object speed extraction means; a subtraction means for subtracting the speed average value from the speed calculated by the measurement object speed extraction means; and an integration means for time integrating the speed acquired by the subtraction means. COPYRIGHT: (C)2011,JPO&INPIT |
