发明名称 |
METHOD FOR PRODUCING A THREE-DIMENSIONALLY CONTROLLED SURFACE COATING IN A CAVITY |
摘要 |
The cavity has first and second main walls covered by a photoresist. The photoresist is subjected to electronic or electromagnetic radiation of wavelength comprised between 12.5 nm and 15 nm. A first thickness of the photoresist is exposed to form a first area of sacrificial material and a second area of different nature defining the surface coating. The sacrificial material is removed, the surface coating is formed and has a surface against one of the main walls and a free opposite surface. The lateral dimensions of the surface coating are defined in the cavity by the radiation through the first main wall.
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申请公布号 |
US2011143050(A1) |
申请公布日期 |
2011.06.16 |
申请号 |
US20100965063 |
申请日期 |
2010.12.10 |
申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIESALTERNATIVES |
发明人 |
WACQUEZ ROMAIN;CONSTANCIAS CHRISTOPHE;CORONEL PHILIPPE |
分类号 |
B05D5/00;B05D3/06;C23C16/56 |
主分类号 |
B05D5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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