发明名称 |
Electronic Component Device and Method for Manufacturing the Same |
摘要 |
A vibratory device includes an elastic plate and a piezoelectric diaphragm. The elastic plate includes a fixable portion, a vibratory portion, and a connection portion. The fixable portion is fixed to a fixation member. The vibratory portion is spaced away from a fixable surface of the fixable portion that faces the fixation member and arranged substantially in parallel with the fixable surface. The connection portion connects a first end of the fixable portion in its planar direction and a first end of the vibratory portion in its planar direction. The piezoelectric diaphragm is disposed on a surface of the vibratory portion that is adjacent to the fixable portion. In a direction N normal to the surface of the vibratory portion adjacent to the fixable portion, at least part of the second piezoelectric diaphragm does not overlap the fixable portion.
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申请公布号 |
US2011140574(A1) |
申请公布日期 |
2011.06.16 |
申请号 |
US201113034887 |
申请日期 |
2011.02.25 |
申请人 |
MURATA MANUFACTURING, CO., LTD. |
发明人 |
KAGAYAMA KENJI;UNAMI TOSHIHIKO |
分类号 |
H01L41/053 |
主分类号 |
H01L41/053 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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