HYBRID GAS INJECTOR

摘要

A gas injector for use in injecting process gas into a space in a vertical furnace between a tower supporting multiple wafers and a tubular liner includes a tubular straw having an open distal end and a first bore extending along a first axis and composed of a first single material selected from the group consisting of silicon, quartz, and silicon carbide, and a connector detachably connected to the straw section, composed of a second material other than the first material and including a supply tube having a second bore extending along a second axis perpendicular to the first axis and in fluid communication with the first bore and having a distal end connectable to a gas supply line.