| 摘要 |
PROBLEM TO BE SOLVED: To provide an MEMS optical scanner achieving miniaturization and also enlarging mechanical deviation angle of a movable part, while including a light receiving element whose output changes according to a mechanical deviation of the movable part. SOLUTION: The MEMS optical scanner is formed using SOI substrate (a semiconductor substrate) 100, and includes: an outer frame part 10; a movable part 20 provided with a mirror surface 21; a movable part forming substrate 1 having a pair of torsion springs 30, 30; a first cover substrate 2 joined to one surface side of the movable part forming substrate 1; and a second cover substrate 3 joined to the other surface side of the movable part forming substrate 1. A diffraction grating 5 is formed on the mirror surface 21 side of the movable part 20 of the movable part forming substrate 1. The first cover substrate 2 is provided with an incident light transmitting part 203 for transmitting incident light and a scanning light transmitting part 204 for transmitting scanning light including reflected light, which is 0-order diffraction light, and a light receiving element 6 receiving diffraction light of specific order except 0-order is provided on the movable part forming substrate 1 side. COPYRIGHT: (C)2011,JPO&INPIT
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