| 摘要 |
PROBLEM TO BE SOLVED: To suppress local thermal deformation of a reflection mirror, and to prevent deterioration of optical characteristics, such as a blurring, distortion, etc., of a focused image. SOLUTION: An optical reflection mirror includes: a mirror face body 2 having a reflection face; a waffle structure 5, which is connected to a face opposite to the reflection face of the mirror face body 2, has a partition wall 4 composed of the same material as the mirror face body 2, and includes a heat generating part 8 in the partition wall 4; and an electric power supply part for supplying electric power to the heat generating part 8. When heat is supplied from an outside to the optical reflection mirror, by making the heat generating part 8 heat, the entire optical reflection mirror is adjusted to the temperature of the portion which has the largest heat input. COPYRIGHT: (C)2011,JPO&INPIT
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